【英文】白宫报告：4大关键产品供应链百日评估（第 14017 号行政命令）（250页）

英文研究报告 2021年06月21日 07:15 管理员

As indicated above, for lithography, ASML (Netherlands) is the sole producer of EUV stepper/scanners, which are essential for producing integrated circuits with a linewidth of 5 nm or less. However, only two semiconductor manufacturers, TSMC and Samsung, currently use EUV machines in production, which cost more than $100 million. Both ASML and Nikon produce Deep Ultra-Violet (DUV) photolithography machines that cast a beam of light through a photomask and creates a small image of the photomask’s pattern onto a wafer. Outside of the Netherlands and Japan, the United States and other countries’ share in lithography equipment is primarily in lithography equipment for specific lower volume chips or for making photomasks.

An exception to Japanese and Dutch leadership is MOCVD equipment, which is used in the production of semiconductors made from materials other than silicon (such as GaN and GaAs), including LEDs, laser diodes and other photonic chips, power/RF devices, and solar cells. As mentioned above, there are defense implications for GaN chips. MOCVD equipment is manufactured by Veeco (U.S.), Aixtron (Germany) and AMEC (China). China attempted to gain market share in the MOCVD market through acquisitions. In 2016, Chinese entity Fujian Grand Chip Investment Fund, a company formed for the transaction that included state-and regional owned bodies, tried to buy Aixtron, but the prospective acquirer dropped its takeover bid after the deal was blocked by President Obama after a review conducted by the Committee on Foreign Investment in the United States (CFIUS).